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BARL Optimization Benchmark

Generated on 2026-06-11 with the COMPASS TMM solver on the generic 1.0 um BSI stack.

This report turns the BARL cookbook recipe into a reproducible benchmark. It sweeps single-layer Si3N4 thickness, a two-layer SiO2/HfO2 grid, and then compares representative designs on the same 400-700 nm wavelength grid.

Executive summary

  • The 550 nm ideal ARC index between cf_green and silicon is 2.5148; Si3N4 gives a quarter-wave thickness of 67.9612 nm.
  • The best single-layer Si3N4 sweep point is 70 nm with mean R=0.0604.
  • The best two-layer SiO2/HfO2 grid point is SiO2 5 nm / HfO2 65 nm with mean R=0.0627.
  • Best design in this candidate set reduces mean reflection by 0.029 absolute versus no BARL.

Planar proxy

This is a TMM planar green-stack benchmark. It is appropriate for BARL screening and reflection trends, but it does not include lateral Bayer geometry, microlens focusing, metal-grid diffraction, or crosstalk.

Candidate Spectra

BARL design spectra

Single-layer Sweep

Single-layer BARL sweep

Two-layer Sweep

Two-layer BARL heatmap

Design Scorecard

BARL scorecard

Designrolelayerstotal nmmean Rmax RR@550mean Aenergy residual
No BARLbaselinenone00.08950.36560.00910.64921.11e-16
Default 4-layersample defaultsio2 10 nm / hfo2 25 nm / sio2 15 nm / si3n4 30 nm800.06980.22130.22130.63451.11e-16
Si3N4 quarter-waveanalyticsi3n4 68 nm67.96120.06050.17880.17880.62741.11e-16
Best single Si3N4sweep bestsi3n4 70 nm700.06040.17660.17660.62720
Best SiO2/HfO2sweep bestsio2 5 nm / hfo2 65 nm700.06270.1950.1950.62941.11e-16

Interpretation

  • BARL tuning should optimize broadband reflection, not only R at 550 nm. A quarter-wave layer is a useful seed, but it is not automatically the broadband optimum once color-filter and planarization phases are included.
  • The default sample BARL is an illustrative process stack, not a guaranteed optimum. This report makes that explicit by comparing it against simple swept alternatives.
  • The two-layer optimum sits on the lower SiO2 sweep boundary, so the next local search should extend toward thinner SiO2 or test HfO2-only variants.
  • After a TMM BARL candidate is selected, run a patterned RCWA check because the metal grid and microlens can move the apparent optimum.

Regeneration

powershell
uv run python scripts\generate_barl_optimization_report.py

Generated metrics are stored at docs/public/reports/barl-optimization/barl_optimization_metrics.json.