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References ​

Key publications and resources that underpin the physics and algorithms in COMPASS.

RCWA theory ​

  • M.G. Moharam, E.B. Grann, D.A. Pommet, and T.K. Gaylord, "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings," J. Opt. Soc. Am. A, vol. 12, no. 5, pp. 1068-1076, 1995.

  • M.G. Moharam, D.A. Pommet, E.B. Grann, and T.K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach," J. Opt. Soc. Am. A, vol. 12, no. 5, pp. 1077-1086, 1995.

Fourier factorization (Li rules) ​

  • L. Li, "Use of Fourier series in the analysis of discontinuous periodic structures," J. Opt. Soc. Am. A, vol. 13, no. 9, pp. 1870-1876, 1996.

  • L. Li, "New formulation of the Fourier modal method for crossed surface-relief gratings," J. Opt. Soc. Am. A, vol. 14, no. 10, pp. 2758-2767, 1997.

S-matrix algorithm ​

  • L. Li, "Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings," J. Opt. Soc. Am. A, vol. 13, no. 5, pp. 1024-1035, 1996.

  • T. Schuster, J. Ruoff, N. Kerwien, S. Rafler, and W. Osten, "Normal vector method for convergence improvement using the RCWA for crossed gratings," J. Opt. Soc. Am. A, vol. 24, no. 9, pp. 2880-2890, 2007.

FDTD method ​

  • A. Taflove and S.C. Hagness, Computational Electrodynamics: The Finite-Difference Time-Domain Method, 3rd ed. Artech House, 2005.

  • K.S. Yee, "Numerical solution of initial boundary value problems involving Maxwell's equations in isotropic media," IEEE Trans. Antennas Propag., vol. 14, no. 3, pp. 302-307, 1966.

Numerical stability ​

  • S. Kim and D. Lee, "Eigenvalue broadening technique for stable RCWA simulation of high-contrast gratings," Comput. Phys. Commun., vol. 282, 108547, 2023.

Silicon optical properties ​

  • M.A. Green, "Self-consistent optical parameters of intrinsic silicon at 300 K including temperature coefficients," Solar Energy Materials and Solar Cells, vol. 92, no. 11, pp. 1305-1310, 2008.

  • E.D. Palik, Handbook of Optical Constants of Solids, Academic Press, 1998.

Image sensor physics ​

  • A. El Gamal and H. Eltoukhy, "CMOS image sensors," IEEE Circuits and Devices Magazine, vol. 21, no. 3, pp. 6-20, 2005.

  • S.K. Mendis, S.E. Kemeny, R.C. Gee, B. Pain, C.O. Staller, Q. Kim, and E.R. Fossum, "CMOS active pixel image sensors for highly integrated imaging systems," IEEE J. Solid-State Circuits, vol. 32, no. 2, pp. 187-197, 1997.

Thin film optics ​

  • H.A. Macleod, Thin-Film Optical Filters, 5th ed. CRC Press, 2017.

  • M. Born and E. Wolf, Principles of Optics, 7th ed. Cambridge University Press, 1999.

Solver libraries ​

  • torcwa: PyTorch-based RCWA. GPU-accelerated.
  • grcwa: GPU RCWA implementation.
  • meent: Metasurface electromagnetic solver with analytic eigendecomposition.
  • fdtd (flaport): PyTorch-based FDTD.
  • Meep: MIT Electromagnetic Equation Propagation (open-source FDTD).

Software tools ​