참고 문헌
COMPASS의 물리학과 알고리즘을 뒷받침하는 주요 논문 및 자료입니다.
RCWA 이론
M.G. Moharam, E.B. Grann, D.A. Pommet, and T.K. Gaylord, "Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings," J. Opt. Soc. Am. A, vol. 12, no. 5, pp. 1068-1076, 1995.
M.G. Moharam, D.A. Pommet, E.B. Grann, and T.K. Gaylord, "Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach," J. Opt. Soc. Am. A, vol. 12, no. 5, pp. 1077-1086, 1995.
푸리에 분해 (Li 규칙)
L. Li, "Use of Fourier series in the analysis of discontinuous periodic structures," J. Opt. Soc. Am. A, vol. 13, no. 9, pp. 1870-1876, 1996.
L. Li, "New formulation of the Fourier modal method for crossed surface-relief gratings," J. Opt. Soc. Am. A, vol. 14, no. 10, pp. 2758-2767, 1997.
S-행렬 알고리즘
L. Li, "Formulation and comparison of two recursive matrix algorithms for modeling layered diffraction gratings," J. Opt. Soc. Am. A, vol. 13, no. 5, pp. 1024-1035, 1996.
T. Schuster, J. Ruoff, N. Kerwien, S. Rafler, and W. Osten, "Normal vector method for convergence improvement using the RCWA for crossed gratings," J. Opt. Soc. Am. A, vol. 24, no. 9, pp. 2880-2890, 2007.
FDTD 방법
A. Taflove and S.C. Hagness, Computational Electrodynamics: The Finite-Difference Time-Domain Method, 3rd ed. Artech House, 2005.
K.S. Yee, "Numerical solution of initial boundary value problems involving Maxwell's equations in isotropic media," IEEE Trans. Antennas Propag., vol. 14, no. 3, pp. 302-307, 1966.
수치 안정성
- S. Kim and D. Lee, "Eigenvalue broadening technique for stable RCWA simulation of high-contrast gratings," Comput. Phys. Commun., vol. 282, 108547, 2023.
실리콘 광학 특성
M.A. Green, "Self-consistent optical parameters of intrinsic silicon at 300 K including temperature coefficients," Solar Energy Materials and Solar Cells, vol. 92, no. 11, pp. 1305-1310, 2008.
E.D. Palik, Handbook of Optical Constants of Solids, Academic Press, 1998.
이미지 센서 물리학
A. El Gamal and H. Eltoukhy, "CMOS image sensors," IEEE Circuits and Devices Magazine, vol. 21, no. 3, pp. 6-20, 2005.
S.K. Mendis, S.E. Kemeny, R.C. Gee, B. Pain, C.O. Staller, Q. Kim, and E.R. Fossum, "CMOS active pixel image sensors for highly integrated imaging systems," IEEE J. Solid-State Circuits, vol. 32, no. 2, pp. 187-197, 1997.
박막 광학
H.A. Macleod, Thin-Film Optical Filters, 5th ed. CRC Press, 2017.
M. Born and E. Wolf, Principles of Optics, 7th ed. Cambridge University Press, 1999.
솔버 라이브러리
- torcwa: PyTorch 기반 RCWA. GPU 가속 지원.
- grcwa: GPU RCWA 구현체.
- meent: 해석적 고유값 분해를 사용하는 메타표면(metasurface) 전자기 솔버.
- fdtd (flaport): PyTorch 기반 FDTD.
- Meep: MIT 전자기 방정식 전파(MIT Electromagnetic Equation Propagation, 오픈소스 FDTD).
소프트웨어 도구
- PyTorch: pytorch.org -- GPU 연산 프레임워크
- Hydra: hydra.cc -- 설정 관리
- Pydantic: pydantic.dev -- 데이터 유효성 검증
- VitePress: vitepress.dev -- 문서 프레임워크